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Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser

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7 Author(s)
Suhara, T. ; Dept. of Electron., Osaka Univ., Japan ; Taniguchi, T. ; Uemukai, M. ; Nishihara, H.
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A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam aperture is fabricated, and the sensor operation of submicron resolution is demonstrated.<>

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Photonics Technology Letters, IEEE  (Volume:7 ,  Issue: 10 )