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Dispersion and attenuation characteristics of Suspended Microstrip line on multilayer lossy silicon substrate at 60 GHz

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4 Author(s)
Manish Prasad ; Department of Electronics & Computer Engineering Indian Institute of Technology Roorkee-247667-INDIA ; Arun Singh Gaur ; Vivek Kr. Sharma ; Nagendra P. Pathak

In this paper, transmission line parameters such as characteristic impedance Z0, effective dielectric constant epsiveff, attenuation constant alpha of Suspended Microstrip line on multilayer low resistivity silicon substrate are investigated. Effect of variation in the thickness of Si3N4, polyimide and metal layer are studied using HFSS. Due to suspended nature, significant reduction in transmission loss is observed in the simulation.

Published in:

2008 33rd International Conference on Infrared, Millimeter and Terahertz Waves

Date of Conference:

15-19 Sept. 2008