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In this paper, transmission line parameters such as characteristic impedance Z0, effective dielectric constant epsiveff, attenuation constant alpha of Suspended Microstrip line on multilayer low resistivity silicon substrate are investigated. Effect of variation in the thickness of Si3N4, polyimide and metal layer are studied using HFSS. Due to suspended nature, significant reduction in transmission loss is observed in the simulation.
Date of Conference: 15-19 Sept. 2008