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Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer

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4 Author(s)
Takahashi, K. ; Dept. of Nanomech., Tohoku Univ., Sendai ; Bulgan, E. ; Kanamori, Y. ; Hane, K.

Electrostatic comb-drive microactuators were fabricated by electron beam lithography on a 260-nm-thick silicon layer of a silicon-on-insulator wafer. The actuators consisted of comb electrodes, springs, and a frame. Two kinds of microactuators with doubly clamped and double-folded springs were designed and fabricated. The comb electrode was as small as 2.5 mum wide and 8 mum long and was composed of 250-nm-wide, 260-nm-thick, and 2-mum-long fingers. The air gap between the fingers was 350 nm. The spring was 250 nm wide, 260 nm thick, and 17.5 mum long, and the spring constant was 0.11 N/m. The force and displacement generated by the microactuator were 2.3 x 10-7N and 1.0 mum, respectively. Applying an ac voltage, the oscillation amplitude became maximum at a frequency of 132 kHz. The mechanical and electrical characteristics of the fabricated actuators were investigated quantitatively.

Published in:

Industrial Electronics, IEEE Transactions on  (Volume:56 ,  Issue: 4 )