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High-Power Single Transverse Mode Vertical-Cavity Surface-Emitting Lasers With Monolithically Integrated Curved Dielectric Mirrors

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5 Author(s)
Kardosh, I. ; Inst. of Optoelectron., Ulm Univ., Ulm ; Demaria, F. ; Rinaldi, F. ; Menzel, S.
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We report the monolithic integration of vertical-cavity surface-emitting lasers (VCSELs) with curved dielectric mirrors. The laser structure has an InGaAs/GaAs gain region and incorporates a photoresist pattern fabricated on the substrate side. A dielectric distributed Bragg reflector is applied on the curved photoresist surface which provides sufficient optical feedback for laser operation. On-wafer measurements at room temperature show single transverse mode output powers up to 15.0 mW under continuous wave operation.

Published in:

Photonics Technology Letters, IEEE  (Volume:20 ,  Issue: 24 )