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Focused-Ion-Beam Fabrication of Slots in Silicon Waveguides and Ring Resonators

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7 Author(s)
Schrauwen, Jonathan ; Dept. of Inf. Technol., Ghent Univ.-IMEC, Ghent ; Van Lysebettens, J. ; Claes, T. ; De Vos, K.
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We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mum.

Published in:

Photonics Technology Letters, IEEE  (Volume:20 ,  Issue: 23 )