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A pulsed power generator with a nanosecond pulsewidth has been developed and applied to ozone production. Coaxial reactors connected in parallel are used in the experiment. The system ozone production yield, which is evaluated from the initial energy in the primary storage capacitors, is approximately 190 g/kWmiddoth when dry oxygen is used as the ingredient gas. A four-parallel chamber reactor gives higher concentrations of ozone and higher yields in the experimental conditions. This reactor seems to be most suitable to obtain the proper streamer corona volume and also to match the impedance of the generator. The connection between the generator and the reactor also affects the efficiency.