Referenced Items are not available for this document.
A dynamic-stress analysis method, based on time-resolved micro Raman spectroscopy, has been developed for reliability studies of microelectromechanical systems. This novel technique is illustrated by measuring temporally and spatially resolved stress maps of a piezoelectrically actuated silicon microcantilever when driven at its first- (6.094 kHz) and second-order (37.89 kHz) resonant frequencies. Stress amplitudes of up to 180 plusmn 10 MPa were measured at the maximum stress locations. The time-resolved Raman stress measurements are compared to the results of finite-element analysis and laser Doppler vibrometry.[2008-0003].
Published in:
Microelectromechanical Systems, Journal of
(Volume:17
,
Issue:
6
)
Date of Publication: Dec. 2008
- Page(s):
- 1315 - 1321
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 10348080
- Digital Object Identifier :
- 10.1109/JMEMS.2008.2004849
- Product Type:
- Journals & Magazines
- Date of Publication :
- 28 October 2008
- Date of Current Version :
- 02 December 2008
- Issue Date :
- Dec. 2008
- Sponsored by :
- IEEE Electron Devices Society
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
