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Semiconductor manufacturing equipment data acquisition simulation for timing performance analysis

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5 Author(s)
Ya-Shian Li-Baboud ; Semicond. Electron. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD ; Xiao Zhu ; Anand, D. ; Hussaini, S.
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The ability to acquire quality equipment and process data is important for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator has been developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator is used to identify and explore methods to mitigate the latencies and provide guidance on accurate time-stamping for equipment data acquisition systems.

Published in:

Precision Clock Synchronization for Measurement, Control and Communication, 2008. ISPCS 2008. IEEE International Symposium on

Date of Conference:

22-26 Sept. 2008