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Design and fabrication of SOI-based micromirror for laser raster scanning display

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3 Author(s)
Liu Wenjing ; Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing ; Tang Yongming ; Wang Baoping

In this paper, the design and fabrication of Silicon-On-Insulator scanning micromirrors that have high angular precision over a large scan angle is described. These microscanners are actuated by electrostatic comb drives, which consume minimum amounts of power. When driven by AC signals, these scanners have fast scan rates and large scan angles.

Published in:

SOI Conference, 2008. SOI. IEEE International

Date of Conference:

6-9 Oct. 2008