By Topic

A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lee, J.B. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Chen, Z. ; Allen, M.G. ; Rohatgi, A.
more authors

A hydrogenated amorphous silicon (a-Si:H) solar cell array that is designed as an on-board power source for electrostatic microelectromechanical systems (MEMS) is presented. A single cell consists of a triple layer of p-i-n/p-i-n/p-i-n a-Si:H and produces an open circuit voltage (VOC) of 1.8~2.3 V, a short circuit current density (JSC) of 2.8 mA/cm2, and fill factor (FF) of 0.495. A series interconnected array of 100 single solar cells (total array area of 1 cm2) is fabricated in an integrated fashion and produces an array VOC of 150 V, and array short circuit current (ISC) of 2.8 μA under Air Mass (AM) 1.5 illumination. To demonstrate the usefulness of this solar cell array as an on-board power source for electrostatically driven micromachined devices, it has been packaged with a movable micromachined silicon (Si) mirror in a hybrid manner. The movable Si mirror is directly driven by the cell array electrical output, and the motion of the mirror plate has been observed reproducibly. Variation of light intensity and/or number of illuminated cells produces different values of array VOC, thus enabling control of the deflection of the Si mirror by variation of incident light intensity

Published in:

Microelectromechanical Systems, Journal of  (Volume:4 ,  Issue: 3 )