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Integrated force arrays: theory and modeling of static operation

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5 Author(s)

Integrated force arrays (IFAs) are a novel means of microelectromechanical actuation. They are membranes that consist of thousands of micron-scale deformable capacitors and are capable of contraction and force exertion in one dimension by application of an applied voltage. The theory and modeling of the static operation of a representative unit device and an array is presented. The electrostatic and elastic forces present in the system are considered and classical beam theory and superposition are applied to calculate the voltage-induced closure and force generation of the networks without the aid of finite element analysis. It is shown that contraction and force generation are expected at reasonable voltages for these modular structures: Ideal system contraction on the order of 40% is possible and minimum external forces of 4500 μN/mm2 are expected with the application of 50 V

Published in:

Journal of Microelectromechanical Systems  (Volume:4 ,  Issue: 3 )