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Silicon flow sensors

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1 Author(s)
B. W. van Oudheusden ; Delft University of Technology, Electronic Instrumentation Laboratory, Department of Electrical Engineering, Delft, Netherlands

A short review is given of the principles of thermal flow sensors in silicon. Sensor structures based on the thermal anemometer principle are discussed, as are the integrated flow sensors developed at Delft University of Technology which use the detection of an onchip temperature difference. Recent research on one-and two-dimensional sensors for the measurement of both flow magnitude and direction are presented, including experimental results.

Published in:

IEE Proceedings D - Control Theory and Applications  (Volume:135 ,  Issue: 5 )