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Miniature silicon resonant pressure sensor

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2 Author(s)
Greenwood, J.C. ; STC Technology Ltd., Harlow, UK ; Satchell, D.W.

An absolute barometric pressure sensor which has shown exceptional performance is described in the paper. It consists of a mechanical resonator whose resonant frequency is changed by strain induced by applied pressure. The active element is formed in one piece, from single-crystal silicon, by microengineering techniques. It has a range from vacuum to a pressure of over 1 bar (105 Pa) and can resolve less than 1 part in 105 of full scale.

Published in:

Control Theory and Applications, IEE Proceedings D  (Volume:135 ,  Issue: 5 )

Date of Publication:

September 1988

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