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A charge-based silicon nanowire FET (SNWT) compact model has been developed. For the first time, inversion charge of SNWT with arbitrary doping concentration is described by an accurate equation including the effects of doping and volume inversion. Analytic drain current, transconductance, output conductance, terminal charges and capacitance are all physically derived and compared with numerical simulation. It shows that the core model is valid for all operation regions and a wide range of physical configuration including channel doping concentrations and geometrical dimensions. Moreover, advanced physical effects have been included in the model self-consistently.