The miniaturization technologies: past, present, and future

Microelectromechanical systems (MEMS), micro systems technologies (MST, primarily in Europe) and micromanufacturing have become synonymous with the design, development, and manufacture of very small devices and systems. This paper overviews the history of the major technologies that are utilized in this field. After this brief historical overview of the technologies, a short description of MEMS technologies is presented. The status of the MEMS effort worldwide is reviewed with emphasis on the United States, Japan, and the European Community with particular emphasis placed on Germany, the Netherlands, and Switzerland. The future for the technology along with technology transfer and management is discussed from the standpoint of market pull. Bulk and surface micromachining of silicon, X-ray micromachining using the LIGA process, and the complementary processes such as laser and focused ion beam micromachining are reviewed