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Browse Journals & Magazines > Optoelectronics, IEE Proceedi ...> Volume:134 Issue:5 Help

On-chip integrated optic mirrors in Ti: LiNbO3 by ion-beam micromachining

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3 Author(s)
Syms, R.R.A. ; Rutherford Appleton Laboratory, EBLF Group, Didcot, UK ; Syms, R.R.A. ; Watkins, R.E.J.

A complete process is described whereby on-chip mirrors may be fabricated in Ti : LiNbO3 stripe waveguide devices using micro-focal ion-beam machining. Experimental results are presented for a device operating at 1.523 ¿m wavelength, TM mode. An interferometric technique is used to distinguish the reflection from the on-chip mirror from other spurious reflections. Approximately 24% power reflectivity is observed. Results are compared with a simple theoretical model of the chip response under different conditions, and good agreement is obtained.

Published in:
Optoelectronics, IEE Proceedings J  (Volume:134 ,  Issue: 5 )

Date of Publication: October 1987

Page(s):
269 - 275
ISSN :
0267-3932
Digital Object Identifier :
10.1049/ip-j:19870045
Product Type:
Journals & Magazines
Date of Current Version :
11 November 2008
Issue Date :
October 1987

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