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Size distribution of silicon nanoclusters determined by transmission electron microscopy

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3 Author(s)
C. R. Mokry ; The University of Western Ontario, London, Canada, N6A 3K7 ; P. J. Simpson ; A. P. Knights

Silicon nanoclusters were formed in SiO2 by ion implantation and annealing. Transmission Electron Microscopy (TEM) images were used to investigate their size distribution as a function of depth in the oxide film.

Published in:

2008 5th IEEE International Conference on Group IV Photonics

Date of Conference:

17-19 Sept. 2008