By Topic

SOI submicron rib waveguides: Design, fabrication and characterization

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Xuejun Xu ; State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing ; Shaowu Chen ; Zhiyong Li ; Yude Yu
more authors

We present detailed design, fabrication, and characterization issues of submicron rib waveguides based on silicon-on-insulator. The waveguides fabricated by EBL and ICP processes have propagation loss of 1.8 dB/mm and bend loss of 0.14 dB/90deg for bends with radius of 5 mum.

Published in:

Group IV Photonics, 2008 5th IEEE International Conference on

Date of Conference:

17-19 Sept. 2008