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SOI submicron rib waveguides: Design, fabrication and characterization

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5 Author(s)
Xuejun Xu ; State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing ; Shaowu Chen ; Zhiyong Li ; Yude Yu
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We present detailed design, fabrication, and characterization issues of submicron rib waveguides based on silicon-on-insulator. The waveguides fabricated by EBL and ICP processes have propagation loss of 1.8 dB/mm and bend loss of 0.14 dB/90deg for bends with radius of 5 mum.

Published in:

Group IV Photonics, 2008 5th IEEE International Conference on

Date of Conference:

17-19 Sept. 2008

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