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Room-temperature direct bonding for integrated optical devices

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3 Author(s)
Takei, R. ; Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo ; Abe, K. ; Mizumoto, T.

We report a room-temperature direct bonding techniques for water combinations of InP-Ce:YIG, Si-InP and Si-LiNbO3. This techniques is versatile for integrated optical devices that are composed of different crystals.

Published in:

Nano-Optoelectronics Workshop, 2008. i-NOW 2008. International

Date of Conference:

2-15 Aug. 2008