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Determination of the mosaic structure of GaN films by high resolution-ray diffraction

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7 Author(s)
Hongtao Li ; Dept. of Electron. Eng., Tsinghua Univ., Beijing ; Luo, Yi ; Wang, Lai ; Xi, Guangyi
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Using Pseudo-Voigt functions instead of Gauss or Lorentz functions to fit HR-XRD curves, the widely used Williamson-Hall plot was modified. Then the mosaic structure parameters of various GaN-films were precisely determined by this method.

Published in:

Nano-Optoelectronics Workshop, 2008. i-NOW 2008. International

Date of Conference:

2-15 Aug. 2008

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