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Using physics-based circuit models, the performances of carbon nanotube (CNT) interconnects, both single- and multiwall (SWNT and MWNT), are benchmarked against their copper counterparts at a realistic operating temperature (100degC). The models used capture various electron phonon scattering mechanisms and the dependence of quantum conductance on temperature and diameter. It is demonstrated that any performance comparison between CNT and copper wires needs to be done at realistic temperatures because changes in temperature affect copper and CNT interconnects quite differently. The results of this paper demonstrate that a hybrid system of copper/SWNT/MWNT offers the highest performance enhancement for interconnects.