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In this study, the growth of high-density single-crystalline ZnO nanowires on patterned ZnO:Ga/ SiO2/Si templates was reported. We also adsorbed Au onto nanowire surfaces and fabricated ZnO nanowire acetone vapor sensors. With 200-ppm acetone vapor concentration, it was found that we could enhance the device sensitivities at 300deg C from 18.5% to 82.5% by Au adsorption. It was also found that measured responses at 300degC were around 52%, 61%, 71%, 77%, and 82% when the accumulative acetone vapor concentration reached 5, 10, 50, 100, and 200 ppm, respectively, for the ZnO nanowire sensor with Au adsorption.