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Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators

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4 Author(s)
Chengjie Zuo ; Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA ; Sinha, N. ; Van der Spiegel, J. ; Piazza, G.

This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noise values between -88 and -68 dBc/Hz at 1 kHz offset and phase noise floors as low as -160 dBc/Hz at 1 MHz offset. The same Pierce circuit design is employed to sustain oscillations at the 4 different frequencies, while the oscillator core consumes at most 10 mW. The AlN resonators are currently wirebonded to the integrated circuit realized in the AMIS 0.5 mum 5 V CMOS process. This work constitutes a substantial step forward towards the demonstration of a single-chip multi-frequency reconfigurable timing solution that could be used in wireless communications and sensing applications.

Published in:

Frequency Control Symposium, 2008 IEEE International

Date of Conference:

19-21 May 2008