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Automated robot cell for EBiD-based nano-assembly

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2 Author(s)
Stone, C. ; Div. Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg ; Fatikow, S.

This paper describes the alignment automation of nanotools and nanoparts inside the vacuum chamber of a scanning electron microscope (SEM). As nanopart example carbon nanotubes have been selected and as a nanotool a tip of a scanning tunneling microscope has been chosen. The experimental setup and its control architecture are shown. Different microrobots and sensors can be integrated in a flexible manner using a common control interface within this architecture. The system easily scales up for more complex robot and sensor setups. An automation sequence is proposed and experimental data is evaluated.

Published in:

Industrial Informatics, 2008. INDIN 2008. 6th IEEE International Conference on

Date of Conference:

13-16 July 2008

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