By Topic

Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Jia-Hui Fu ; Sch. of Electron. & Inf. Technol., Harbin Inst. of Technol., Harbin ; Guo-hui Yang ; Xun-jun He ; Kai Tang
more authors

The reliability of MEMS switches is closely linked to their operational and environmental conditions. This paper reports on the investigation of the actuated voltage shift mechanism in MEMS capacitive switch for millimeter-wave phase shifter design. Considering the dielectric charging and polarization effects on capacitive MEMS switch with silicon nitride as dielectric layer, an accurate model of dielectric charging and voltage shift caused by charge injection under applied voltage and signal is presented, and the influences of applied voltage, applied signal and temperature on the actuated voltage shift are performed. The result shows the proposed model provides valuable insight into the factor impacting the reliability of devices.

Published in:

Industrial Informatics, 2008. INDIN 2008. 6th IEEE International Conference on

Date of Conference:

13-16 July 2008