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A Magnetically Actuated Resonant Mass Sensor With Integrated Optical Readout

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6 Author(s)
Ozturk, A. ; Coll. of Eng., Koc Univ., Istanbul ; Ocakli, H.I. ; Ozber, N. ; Urey, H.
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Nickel cantilevers with integrated diffraction gratings are used as resonant mass sensors with a resolution of 500 femtograms. Their applicability to biosensing is demonstrated with human opioid receptors. The device is fabricated through a single-mask lithographic process. The microoptical readout provides a simple measurement platform with one external photodiode. Thanks to its AC operation principle, the device is immune to environmental noise and entails a high tolerance to fabrication defects. Obtained signal-to-noise ratio is comparable to that of a high-end Doppler vibrometer. The device with these aspects for systems integration and microarray technology is a candidate for low-cost portable sensors.

Published in:

Photonics Technology Letters, IEEE  (Volume:20 ,  Issue: 23 )

Date of Publication:

Dec.1, 2008

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