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Browse Conference Publications > Nanotechnology, 2008. NANO '0 ... Help

A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications

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2 Author(s)
Yapici, M.K. ; Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX ; Jun Zou

We report the development and application of a novel scanning probe array that consists of "blunt" and "sharp" tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode.

Published in:
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on

Date of Conference: 18-21 Aug. 2008

Page(s):
147 - 150
E-ISBN :
978-1-4244-2104-6
Print ISBN:
978-1-4244-2103-9
INSPEC Accession Number:
10203740
Conference Location :
Arlington, TX
Digital Object Identifier :
10.1109/NANO.2008.50
Product Type:
Conference Publications

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