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Spatial scanning-probe array system for silicon-on-insulator integrated circuits

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1 Author(s)
Wen-Ren Yang ; Dept. of Electr. Eng., Changhua Univ. of Educ., Changhua

A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical signal is also proposed and simulated.

Published in:

Circuits and Systems, 2008. MWSCAS 2008. 51st Midwest Symposium on

Date of Conference:

10-13 Aug. 2008