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We present different applications of systems including networked sensors and micro- and nano-mirror arrays on large areas for light deflection and control. Mirror arrays are intended for implementation into windows of buildings to provide functionalities like daylight guiding into rooms, heat regulation and glare protection. Placed between the two panes of a window, these mirrors are maintenance-free and not subject to defilement. The use of micro system technology on large areas requires very low-cost processes and materials, as well as a concept with a minimum of process steps and very easy and reliable process control. We present our technological approaches and first technological results. Further applications such as artificial light guiding and light concentration for photovoltaic applications are proposed.