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Design of a micro six-axis force sensor based on double layer E-type membrane

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4 Author(s)
Weichao Yang ; Inst. of Intell. Machines, Chinese Acad. of Sci., Hefei ; Bo Song ; Yong Yu ; Yunjian Ge

The elastic body structure of six-axis force sensor based on the double layer E-type membrane has been used in the normal situation maturely. In this paper, the possibility of the same elastic body structure used in the micro-operation is discussed. The working principle of the sensor structure is introduced firstly, and the static and dynamic characteristics of the elastic body are obtained by finite element analysis. The results demonstrate that six-axis force sensor with this kind of structure can be used in micro-operation and the sensor has high sensitivities, high linearity and almost no static couple in each axis.

Published in:

Information and Automation, 2008. ICIA 2008. International Conference on

Date of Conference:

20-23 June 2008