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Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors

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9 Author(s)
Niels Quack ; Institute of Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich., Center of Mechanics, Tannenstrasse 3, ETH Zentrum, CLA J35, CH-8092 Zürich, Switzerland ; Philipp Rust ; Stefan Blunier ; Jurg Dual
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Results on a tunable resonant cavity enhanced detector (RCED) in the mid-infrared employing a vertically moving, comb-drive actuated micromirror are presented. A wide tuning range of 0.7 mum and a low order configuration have been achieved with a micromirror displacement range of 2.5 mum and a reduction of the optical cavity length respectively.

Published in:

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

Date of Conference:

11-14 Aug. 2008