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Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique

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3 Author(s)
Chia Chen Hsu ; Dept. of Phys., Nat. Chung Cheng Univ., Chiayi ; Lai, Ngoc Diep ; Jian Hung Lin

We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.

Published in:

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Date of Conference:

11-14 Aug. 2008