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Simulation-based design of a MEMS X-ray optic for X-ray astronomy

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7 Author(s)
M. Koshiishi ; Institute of Space and Astronautical Science (ISAS), Japan Aerospace Exploration Agency (JAXA), Japan ; Y. Ezoe ; I. Mitsuishi ; M. Mita
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An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

Published in:

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

Date of Conference:

11-14 Aug. 2008