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Simulation-based design of a MEMS X-ray optic for X-ray astronomy

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7 Author(s)
Koshiishi, M. ; Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency, Tokyo ; Ezoe, Y. ; Mitsuishi, I. ; Mita, M.
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An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

Published in:

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Date of Conference:

11-14 Aug. 2008