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Design and fabrication of CMOS-integrated thermoelectric IR microsensors

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2 Author(s)
Keng-Shuen Lin ; Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu City, 30013, TAIWAN ; Rongshun Chen

This work presents a thermoelectric infrared microsensor which is designed and fabricated with TSMC CMOS-MEMS processes. The proposed device can achieve the responsivity of 432.3 V/W and time constant of 2.49 ms at 1 atm.

Published in:

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

Date of Conference:

11-14 Aug. 2008