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Evaluation of X-ray reflectivity of a MEMS X-ray optic

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11 Author(s)
Mitsuishi, I. ; Inst. of Space & Astronaut. Sci. (ISAS), Japan Aerosp. Exploration Agency (JAXA), Tokyo ; Ezoe, Y. ; Koshiishi, M. ; Mita, M.
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X-ray reflectivity of an ultra light-weight X-ray optic using MEMS technologies was measured in two different energies (0.28 keV and 1.49 keV). The obtained reflectivities can be understood by considering the mirror surface structures.

Published in:

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Date of Conference:

11-14 Aug. 2008