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3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement

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8 Author(s)
Sandner, T. ; Micro Scanner Devices, Fraunhofer Inst. for Photonic Microsyst., Dresden ; Wildenhain, M. ; Klose, T. ; Schenk, H.
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We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system weight. We show first results using a single-mirror prototype.

Published in:

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Date of Conference:

11-14 Aug. 2008