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Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

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5 Author(s)
M. Nakada ; Institute of Industrial Science, The University of Tokyo, 4-6-1 komaba Meguro-ku, 153-8505, Japan ; K. Takahashi ; A. Higo ; H. Fujita
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We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

Published in:

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

Date of Conference:

11-14 Aug. 2008