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Large linear micromirror array for UV femtosecond laser pulse shaping

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8 Author(s)
Severin Waldis ; Institute of Microtechnology, Université de Neuchâtel, Rue Jaquet-Droz 1, CH-2002 Switzerland ; Stefan M. Weber ; Wilfried Noell ; Jerome Extermann
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We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.

Published in:

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

Date of Conference:

11-14 Aug. 2008