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Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens

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4 Author(s)
Kimura, Y. ; Corp. R&D Labs., Pioneer Corp., Tsurugashima ; Onoe, A. ; Higurashi, E. ; Sawada, Renshi

We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.

Published in:

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Date of Conference:

11-14 Aug. 2008