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On-Chip Electrical Breakdown of Metallic Nanotubes for Mass Fabrication of Carbon-Nanotube-Based Electronic Devices

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7 Author(s)
Gyoung-Ho Buh ; Korea Res. Inst. of Chem. Technol., Daejeon ; Jea-Ho Hwang ; Eun-Kyoung Jeon ; Hye-Mi So
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A mass fabrication scheme for carbon-nanotube (CNT)-based electronic devices is developed by combining the semiconductor wafer electrical sorting with selective burning of metallic CNT wires. By applying a millisecond electrical pulse to CNTs with the optimized logical scheme of voltage stress, we successfully removed the metallic CNTs but not the high-performance semiconductor CNTs. The fabrication scheme implemented with a probe card achieved a 100 % gross yield of CNT-based sensors with a short process time.

Published in:

IEEE Transactions on Nanotechnology  (Volume:7 ,  Issue: 5 )