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A new green function-based method for extracting parasitics in inhomogeneous substrates is presented. This approach overcomes the limitation of prior green function-based methods and allows extraction of substrate parasitics in the presence of sinkers, trenches, and wells. A careful use of volume and boundary-element meshing, as well as discrete transforms, yields a technique that is computationally efficient. The accuracy of the method is comparable to that of 3-D semiconductor device simulators with significantly smaller computational costs.