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Measuring micro distance of grating moving light modulator with spectrum analysis method

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2 Author(s)
Zhangjie Huangshanglian ; Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry, Chongqing University, 400030, China ; Zhangzhihai Shunjiyong

Grating moving light modulator (GMLM) is a novel MEMS-based movable diffraction grating with electrostatic actuation, which light modulation is completed by changing micro distance between movable grating and underlying fixed reflector. The micro distance is a key factor to GMLM performance and it is difficult and expensive to measure with a common approach. A novel method using spectrum analysis method based on wavelength scanning is put forward and analyzed in details. Experiments with U-4100 spectrophotometer are carried on, which indicates that such method is available and high repetition. Such wavelength scanning method can measure micro distance in diffraction or interference-based micro module. More important, measurement accuracy is up to nanometer level.

Published in:

2007 7th IEEE Conference on Nanotechnology (IEEE NANO)

Date of Conference:

2-5 Aug. 2007