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Quantum well nanomechanical actuators with atomic vertical resolution

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2 Author(s)
Makowski, J.D. ; Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN ; Talghader, J.J.

A novel continuously tunable vertical actuator with sub-nanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum well surfaces. Deflections from -17 nm to 5 nm with a precision better than three atomic layers have been measured.

Published in:

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Date of Conference:

2-5 Aug. 2007