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Fabrication of lenses for AlGaInP LEDs using Step and Flash Imprint lithography

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4 Author(s)
Jeff Kettle ; Manufacturing Engineering Centre, Cardiff University. The Parade, Newport rd., CF24 3AA, United Kingdom ; Georgi Lalev ; Stefan Dimov ; Richard Perks

This paper describes a new data preparation technique, which allows for the design of optical lenses in a conventional CAD package and immediate transfer to a lithographic system, for example Electron Beam or Focused Ion Beam Lithography. Most importantly, we show that this approach could be used to fabricate lens arrays in templates for Step-and Flash Imprint lithography onto 4iquestwafers. One application for this is to enhancing AlGaInP LED performance by texturing the top current spreading layer.

Published in:

2007 7th IEEE Conference on Nanotechnology (IEEE NANO)

Date of Conference:

2-5 Aug. 2007