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VUV Spectroscopic Measurement for Dielectric Barrier Discharge Excited by Piezoelectric Transformer in He–Xe Mixture

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5 Author(s)
Teranishi, K. ; Inst. of Technol. & Sci., Univ. of Tokushima, Tokushima ; Inada, D. ; Shimomura, N. ; Suzuki, S.
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A new type of compact excimer lamp has been developed using a piezoelectric transformer (PT) which employs the excitation of dielectric barrier discharge (DBD) in a He-Xe (10.8%) mixture. To investigate the vacuum ultraviolet emission characteristics, a spectroscopic measurement is performed for the He-Xe DBD generated by the PT. The emission peak is observed at 172 nm in a high gas-pressure region, and a sharp peak is observed at 147 nm in a low-pressure region. These are derived from the radiation from the Xe2* excimers and the resonance line of the xenon atoms, respectively.

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Plasma Science, IEEE Transactions on  (Volume:36 ,  Issue: 4 )