VUV Spectroscopic Measurement for Dielectric Barrier Discharge Excited by Piezoelectric Transformer in He–Xe Mixture

A new type of compact excimer lamp has been developed using a piezoelectric transformer (PT) which employs the excitation of dielectric barrier discharge (DBD) in a He-Xe (10.8%) mixture. To investigate the vacuum ultraviolet emission characteristics, a spectroscopic measurement is performed for the He-Xe DBD generated by the PT. The emission peak is observed at 172 nm in a high gas-pressure region, and a sharp peak is observed at 147 nm in a low-pressure region. These are derived from the radiation from the Xe
₂
* excimers and the resonance line of the xenon atoms, respectively.