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Negative-Ion-Source Modeling: From Expansion to Extraction Region

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4 Author(s)
Francesco Taccogna ; Ist. di Metodologie Inorganiche e dei Plasmi del Consiglio, Naz. delle Ric., Bari ; Savino Longo ; Mario Capitelli ; Ralf Schneider

In a negative-ion source, the vibrational kinetics of molecules H2 and the negative-ion H- transport are both important in order to understand and optimize H- extraction. In this paper, two different particle models are developed, simulating the expansion and extraction regions of a radio-frequency inductively coupled plasma negative-ion source. These models show the importance of gas- and plasma-surface interaction in the vibrational excitation of molecules and in the direct production of negative ions from the wall.

Published in:

IEEE Transactions on Plasma Science  (Volume:36 ,  Issue: 4 )