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Influence of Operating Parameters on Target Erosion of Rectangular Planar DC Magnetron

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5 Author(s)
Qingquan Qiu ; Dept. of Electr. Eng., Xi''an Jiaotong Univ., Xian ; Qingfu Li ; Jingjing Su ; Yu Jiao
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The influence of the operating parameters such as magnetic field, cathode voltage, and gas pressure on the target erosion of the rectangular planar dc magnetron is discussed in this paper. Through particle simulation for a prototype rectangular magnetron, with the same shape, stronger magnetic field could make the target erosion much sharper; with the same ratio of the field intensity in the end region to that in the straight region, stronger magnetic field could make the anomalous erosion in the curve-out region severer. Furthermore, higher cathode voltage could not only make the target erosion wider but also make the anomalous erosion weaker. Gas pressure has less influence on the target erosion in the straight region, but higher pressure could make the anomalous erosion severer. Finally, how to improve the magnetic field is discussed. Through shimming ferromagnetic and permanent magnet bars in the race track, not only the target erosion becomes wider but also the anomalous erosion could be reduced.

Published in:

Plasma Science, IEEE Transactions on  (Volume:36 ,  Issue: 4 )

Date of Publication:

Aug. 2008

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