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Distribution of Ion-Current Density on Substrate Between Carbon Nanotubes Grown From Low-Temperature Plasma

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3 Author(s)
Levchenko, I. ; Sch. of Phys., Plasma Nanosci., Univ. of Sydney, Sydney, NSW ; Ostrikov, K. ; Xu, S.

Using Monte Carlo simulation technique, we have calculated the distribution of ion current extracted from low-temperature plasmas and deposited onto the substrate covered with a nanotube array. We have shown that a free-standing carbon nanotube is enclosed in a circular bead of the ion current, whereas in square and hexagonal nanotube patterns, the ion current is mainly concentrated along the lines connecting the nearest nanotubes. In a very dense array (with the distance between nanotubes/nanotube-height ratio less than 0.05), the ions do not penetrate to the substrate surface and deposit on side surfaces of the nanotubes.

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Plasma Science, IEEE Transactions on  (Volume:36 ,  Issue: 4 )