By Topic

Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Taschuk, M.T. ; Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB ; Sorge, J.B. ; Steele, J.J. ; Brett, Michael J.

Ion-beam assisted glancing-angle deposition is used to fabricate relative humidity sensors. Ion currents of 3,5, and 7 mA were tested. The morphology and capacitance of the sensors are found to be dependent on the ion current density. The capacitance increases with increasing ion current, especially for the 7 mA case which exhibits a capacitance approximately one order of magnitude greater than a standard glancing-angle deposited film over much of the sensor range.

Published in:

Sensors Journal, IEEE  (Volume:8 ,  Issue: 9 )