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Ion-beam assisted glancing-angle deposition is used to fabricate relative humidity sensors. Ion currents of 3,5, and 7 mA were tested. The morphology and capacitance of the sensors are found to be dependent on the ion current density. The capacitance increases with increasing ion current, especially for the 7 mA case which exhibits a capacitance approximately one order of magnitude greater than a standard glancing-angle deposited film over much of the sensor range.